Chipq Micro has obtained a patent related to suction cup potential monitoring, which monitors the suction cup potential, eliminates charge accumulation, and prevents electrostatic damage.

March 21 News: According to information from the National Intellectual Property Administration, Hefei Xinqi Microelectronics Equipment Co., Ltd. has applied for a patent titled “Suction Cup Voltage Monitoring System for Maskless Direct Write Lithography Exposure Machines and the Direct Write Lithography Exposure Machine.” The patent has been granted with the publication number CN224020147U, with the grant announced on March 20, 2026. The application number is CN202520419485.1, published on March 20, 2026, with an application date of March 11, 2025. Inventors include Ge Xingyu, Zhu Huimin, Cao Guilin, Lu Xiaoqi, and Sun Wenbiao. The patent agency is Beijing Jingwen Intellectual Property Agency Co., Ltd., with patent agent Zhao Qiaocong. The classification code is G03F7/20.

Patent Abstract: The utility model discloses a suction cup voltage monitoring system and a direct write lithography exposure machine for maskless direct write lithography. The system includes a suction cup device, a voltage sensor, a switch component, an ion generator, and a controller. The controller controls the switch to send vacuum or break vacuum commands to regulate airflow in the air duct, thereby controlling the suction cup to enter vacuum or break vacuum states for adsorption or separation of the substrate. It also receives voltage differences from the sensor and, when the suction cup is in break vacuum and the voltage difference exceeds a preset calibration value, sends a discharge command to the ion generator to generate ions in the airflow, effectively eliminating static charge accumulation caused by friction between the suction cup and the substrate, preventing static electricity damage to electronic components on the machine.

Hefei Xinqi Microelectronics Equipment Co., Ltd. was established on June 30, 2015, and listed on the Shanghai Stock Exchange on April 1, 2021. Its registered and office addresses are both in Hefei, Anhui Province. It is a leading enterprise in China’s micro-nano direct write lithography equipment field, with core business in lithography equipment and services, possessing technological and full industry chain advantages.

The company belongs to the Shenwan industry category of Machinery Equipment - Special Equipment - Other Special Equipment, involving concepts such as PCB, annual report pre-increase, OLED, etc. Its main business is R&D, production, sales, and maintenance of direct imaging equipment and direct write lithography equipment centered on micro-nano direct write lithography, covering multiple lithography segments.

In 2025, Xinqi Microelectronics achieved revenue of 1.408 billion yuan, ranking first in the industry, aligned with the industry average and median. Main business revenue breakdown: PCB series 1.08 billion yuan (76.69%), general semiconductor series 233 million yuan (16.58%), leasing and others 87.39 million yuan (6.21%), additional (supplementary) 7.38 million yuan (0.52%). Net profit was 290 million yuan, also ranking first in the industry, consistent with the industry average and median.

Recent patent applications by Hefei Xinqi Microelectronics Equipment Co., Ltd.:

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